TY  - BOOK
AU  - Pauleau,Y.
TI  - Chemical physics of thin film deposition processes for micro- and nano-technologies
T2  - NATO science series. Series II, Mathematics, physics, and chemistry
SN  - 1402005253
AV  - TA 418.9.T45 C44.2002
PY  - 2002///, ©2002
CY  - Dordrecht, Boston
PB  - Kluwer Academic
KW  - Thin films
KW  - Congresses
KW  - Películas delgadas -
KW  - Congresos
KW  - Nanotechnology
KW  - Nanotecnología
N1  - Incluye referencias bibliográficas e índice
ER  -