000 | 02140nam a2200337 a 4500 | ||
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001 | 000545236 | ||
003 | OCoLC | ||
005 | 20240105150225.0 | ||
008 | 100628s2009 xxkae rb 001 0 eng d | ||
010 | _a 2009419379 | ||
020 | _a9780854044658 (hbk.) | ||
020 | _a0854044655 (hbk.) | ||
035 | _a355937 | ||
040 |
_aUKM _bspa _cUKM _dUIASF |
||
050 | 4 |
_aTS 695 _bC535.2009 |
|
245 | 0 | 0 |
_aChemical vapour deposition : _bprecursors, processes and applications / _cedited by Anthony C. Jones, Michael L. Hitchman. |
246 | 3 | _aChemical vapor deposition | |
260 |
_aCambridge, UK : _bRoyal Society of Chemistry, _c2009. |
||
300 |
_axv, 582 p. : _bil. (algunas col.), planos ; _c26 cm. |
||
504 | _aIncluye referencias bibliográficas e índice. | ||
505 | 0 | _aOverview of chemical vapour deposition / Anthony C. Jones and Michael L. Hitchman -- CVD reactors and delivery system technology / Susan P. Krumdieck -- Modeling CVD processes / Mark D. Allendorf ... [et al.] -- Atomic layer deposition . Mikko Ritala and Jaakko Niinisto -- Basic chemistry of CVD and ALD precursors / Mohammad Azad Malik and Paul O'Brien -- CVD of III-V compound semiconductors / Jae-Hyun Ryou, Ravi Kanjolia and Russell D. Dupuis -- Chemical vapor deposition of metals: W, Al, Cu and Ru / Bing Luo and Wayne L. Gladfelter -- Chemical vapour deposition of metal oxides for microelectronics applications / Anthony C. Jones, Helen C. Aspinall and Paul R. Chalker -- Metal-organic chemical vapour deposition of refractory transition metal nitrides / Roland A. Fischer and Harish Parala -- CVD of functional coatings on glass / Ivan P. Parkin and Robert G. Palgrave -- Photo-assisted CVD / Stuart J.C. Irvine and Dan Lamb -- Plasma enhanced chemical vapour deposition processes / Segei E. Alexander and Michael L. Hitchman -- Commercial aspects of CVD / Albert Barry Leese and Alan Rodney Mills. | |
650 | 0 | _aChemical vapor deposition | |
650 | 4 | _aDeposición quimica por vapor | |
700 | 1 | _aJones, Anthony C | |
700 | 1 | _aHitchman, Michael L | |
905 | _a01 | ||
942 | 1 | _cNEWBFXC1 | |
999 |
_c513949 _d513949 |
||
980 |
_851 _gRonald RUIZ |