| 000 | 01241nam a2200385 a 4500 | ||
|---|---|---|---|
| 001 | 000552416 | ||
| 005 | 20240105150446.0 | ||
| 008 | 101112s2005 njua rb 001 0 eng d | ||
| 010 | _a2004058503 | ||
| 020 | _a0471720011 (hardcover) | ||
| 020 | _a9780471720010 (hardcover) | ||
| 035 | _a358506 | ||
| 040 |
_aDLC _bspa _cDLC _dUIASF |
||
| 050 | 4 |
_aQC 718.5.D9 _bL54.2005 |
|
| 100 | 1 | _aLieberman, Michael A | |
| 245 | 1 | 0 |
_aPrinciples of plasma discharges and materials processing / _cMichael A. Lieberman, Allan J. Lichtenberg. |
| 250 | _a2nd ed. | ||
| 260 |
_aHoboken, N.J. : _bWiley-Interscience, _c2005. |
||
| 300 |
_axxxv, 757 p. : _bil. ; _c25 cm. |
||
| 504 | _aIncluye referencias bibliográficas (p. 735-748) e índice. | ||
| 650 | 0 | _aPlasma dynamics. | |
| 650 | 4 | _aPlasma dinámica del (Física) | |
| 650 | 0 |
_aThin films _xSurfaces. |
|
| 650 | 4 |
_aPelículas delgadas _xSuperficies |
|
| 650 | 0 | _aPlasma etching. | |
| 650 | 4 |
_aPlasma - _xErosión selectiva |
|
| 650 | 0 |
_aPlasma chemistry _xIndustrial applications. |
|
| 650 | 4 |
_aQuímica del plasma - _xAplicaciones industriales |
|
| 700 | 1 | _aLichtenberg, Allan J | |
| 905 | _a01 | ||
| 942 | _cNEWBFXC1 | ||
| 999 |
_c520937 _d520937 |
||
| 980 |
_851 _gRonald RUIZ |
||