| 000 | 01260cam a2200373 i 4500 | ||
|---|---|---|---|
| 001 | 000575922 | ||
| 005 | 20240105151225.0 | ||
| 008 | 120905s2002 ne a rb 101 0 eng d | ||
| 020 | _a1402005253 | ||
| 035 | _a377371 | ||
| 035 | _a377372 | ||
| 035 | _a377373 | ||
| 040 |
_aDLC _bspa _cDLC _erda _dUIASF |
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| 050 | 4 |
_aTA 418.9.T45 _bC44.2002 |
|
| 245 | 0 | 0 |
_aChemical physics of thin film deposition processes for micro- and nano-technologies / _cedited by Yves Pauleau. |
| 260 |
_aDordrecht ; _aBoston : _bKluwer Academic, _c2002, ©2002. |
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| 300 |
_axiii, 363 páginas : _bilustraciones ; _c25 cm. |
||
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 490 | 0 |
_aNATO science series. Series II, Mathematics, physics, and chemistry _v55 |
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| 504 | _aIncluye referencias bibliográficas e índice. | ||
| 650 | 0 |
_aThin films _vCongresses |
|
| 650 | 4 |
_aPelículas delgadas - _vCongresos |
|
| 650 | 0 |
_aNanotechnology _vCongresses |
|
| 650 | 4 |
_aNanotecnología _vCongresos |
|
| 700 | 1 |
_aPauleau, Y. _eeditor |
|
| 830 | 0 |
_aNATO science series. _nSeries II, _pMathematics, physics, and chemistry _v55 |
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| 905 | _a01 | ||
| 942 | _cNEWBFXC1 | ||
| 999 |
_c544081 _d544081 |
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| 980 |
_851 _gRonald RUIZ |
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